KLA Converter

Extract text from Wafer inspection files (KLA)


Drop or upload your .KLA file

How to extract text from your KLA file

  1. Click the "Select File" button above, and choose your KLA file.
  2. You’ll see a preview, if available.
  3. Click the "Convert file to..." button to extract text information.

Convert KLA to another file type

To convert KLA Inspection files to another format, you need KLA KlarfViewer or other Data software.

Convert a file to KLA

To convert other file formats to the "Semiconductor Inspection Data" file type, you need software like KLA KlarfViewer or a similar tool.


About KLA files

The .KLA file extension predominantly represents a KLA-Tencor Advanced Results File (KLARF). These files are highly specialized data containers used in semiconductor manufacturing to log wafer inspection results, defect coordinates, die pitch, and metrology data. A secondary use for the .KLA extension is as a game archive format, often referred to as a Ken Levine Archive or KLZIP, which stores compressed assets for games like Kerbal Space Program.

To open semiconductor .KLA files, engineers rely on proprietary foundry software like yieldWerx or the official KLA KlarfViewer. For game archives, specialized modding unpackers are required.

Users frequently need to convert .KLA files because they are tightly locked into niche ecosystems. In semiconductor fabrication, relying purely on proprietary KLA-Tencor software silos the data and slows down engineering analysis. Furthermore, the format is not natively readable by standard data science tools. Game archive versions suffer from similar disadvantages, acting as closed-source containers that standard unzipping software cannot read.

For wafer inspection data, the best conversion targets are CSV, XLSX, or XML. Converting to tabular formats allows engineers to process defect metrics using standard statistical tools, though any internal references to defect bitmap images will be lost in the transition. Converting to generic MAP files is also a practical workaround for transferring die coordinates to other machinery.

Because .KLA files are either highly specific semiconductor logs or bespoke game containers, standard online converters will fail to process them. Typically, only the original foundry software or game engine can fully decode the data. Our tool will inspect the headers, identify whether it is a text-based wafer map or a binary game archive, and allow you to view the raw internal data.

Convert.Guru analyzes your KLA file, detects the exact format, and lets you read the text inside.

Users also converted KOALA, KLARF, ISF and WFM files.


FAQ

If you want to convert KLA file to , you can use KLA KlarfViewer or similar software from the "Wafer Defect Inspection Storage" category. In the File menu, look for Save As… or Export….

To convert files to KLA, try KLA KlarfViewer or another comparable tool in the "Wafer Defect Inspection Storage" category.



The KLA Converter Story

The history of Convert.Guru began over 25 years ago in California with Tom Simondi’s file-format database. A former contributor to Space Shuttle development and a software pioneer of the 1980s, Simondi established a trusted resource for file type analysis that was even referenced by Microsoft Windows XP. Today, we use modern technology to process and convert thousands of file formats while continually improving our KLA converter.